Slot Waveguide Modulator

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Optics Letters
Vol. 41,
Issue 11,
pp. 2501-2504
(2016)
•https://doi.org/10.1364/OL.41.002501

Silicon Slot Waveguide
Plate-slot Polymer Waveguide Modulator On Silicon-on-insulator
Waveguide Antenna
Slot Waveguide Modulator

In this paper, we analyse the performance of a silicon nano-opto-electro-mechanical system (NOEMS) applied as an optical modulator, based on a suspended slot waveguide driven by electrostatic forces. The analysis is carried out with the help of the finite element analysis (FEA) method involving the influences from Casimir force, optical force and electrostatic force. The performance of the. “Silicon-polymer hybrid slot waveguide ring-resonator modulator,” Opt. Express 19(5), 3952–3961 (2011). We demonstrate a ring-resonator modulator based on a silicon-polymer hybrid slot waveguide with a tunability of 12.7 pm/V at RF speeds and a bandwidth of 1 GHz, for optical wavelengths near 1550 nm. Our slot waveguides were fabricated with 193 nm optical lithography, as opposed to the electron beam lithography used for previous results. An ultracompact, broadband, and fully complementary metal-oxide-semiconductor (CMOS) compatible Si nanoplasmonic electro-absorption modulator is proposed based on the recently developed horizontal metal-insulator-silicon-insulator-metal nanoplasmonic slot waveguide.

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Abhijeet Phatak, Zhenzhou Cheng, Changyuan Qin, and Keisuke Goda, 'Design of electro-optic modulators based on graphene-on-silicon slot waveguides,' Opt. Lett. 41, 2501-2504 (2016)
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Abstract

We present a graphene-on-silicon (GoS) suspended vertical slot waveguide. By changing the Fermi level of graphene, the variation in the effective refractive index (RI) of the waveguide is a factor of two larger than that in the traditional GoS rib waveguide. The improvement is due to the light-intensity enhancement and the poor confinement of the optical mode in the slot nanostructure. We design Mach–Zehnder interferometer (MZI) and microring modulators based on the GoS suspended vertical slot waveguide. Our calculations show that the modulators can be energy-efficient and footprint-compact due to the large phase shift of the propagating mode in the waveguide after applying a gate voltage on the graphene. Fabrication of our design is easy and CMOS-compatible. It paves the way for chip-integrated electronic-RI modulators.

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